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Nanomaterials (Basel)

Title:		Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes
Author(s):		Aleksandrova M; Kolev G; Dobrikov G; Brigadin A; Lukin A;
Address:		"Department of Microelectronics, Technical University of Sofia, 1000 Sofia, Bulgaria. Swissimpianti Sagl, 6828 Balerna, Switzerland. Western-Caucasus Research Center, 352808 Tuapse, Russia"
Journal Title:		Nanomaterials (Basel)
Year:		2022
Volume:		20220615
Issue:		12
Page Number:		-
DOI:		10.3390/nano12122066
ISSN/ISBN:		2079-4991 (Print) 2079-4991 (Electronic) 2079-4991 (Linking)
Abstract:		"Due to the unique combination of physicochemical and structural properties of carbyne-enriched nanocoatings, they can be used for the development of high-end electronic devices. We propose using it for the development of sensor platforms based on silicon bulk micromachined membranes that serve as a part of microcapacitors with flexible electrodes, with various sizes and topologies. The carbyne-enriched nanocoating was grown using the ion-assisted pulse-plasma deposition method in the form of 2D-ordered linear-chain carbon with interchain spacing in the range of approximately 4.8-5.03 A. The main characteristics of the fabricated sensors, such as dynamic range, sensitivity, linearity, response, and recovery times, were measured as a function of the ethanol concentration and compared for the different sizes of the micromembranes and for the different surface states, such as patterned and non-patterned. The obtained results are the first step in the further optimization of these sensor platforms to reach more precise detection of volatile organic compounds for the needs of the healthcare, air monitoring, and other relevant fields of human health"
Keywords:		bulk micromachined silicon substrates carbyne-enriched nanocoatings ion-assisted pulse-plasma deposition microfabrication technology volatile organic compounds;
Notes:		"PubMed-not-MEDLINEAleksandrova, Mariya Kolev, Georgi Dobrikov, Georgi Brigadin, Andrey Lukin, Alexander eng KP-06-DO/02 under program ERA.NET RUS+/Bulgarian Science Fund/ 20-58-46014/Russian Foundation for Basic Research/ Switzerland 2022/06/25 Nanomaterials (Basel). 2022 Jun 15; 12(12):2066. doi: 10.3390/nano12122066"