| Title: | Mid-Infrared Serial Microring Resonator Array for Real-Time Detection of Vapor-Phase Volatile Organic Compounds |
| Author(s): | Zhou J; Husseini DA; Li J; Lin Z; Sukhishvili S; Cote GL; Gutierrez-Osuna R; Lin PT; |
| Address: | "The Department of Electrical & Computer Engineering, Texas A&M University, College Station, Texas 77843, United States. The Department of Materials Science & Engineering, Texas A&M University, College Station, Texas 77843, United States. The Department of Biomedical Engineering, Texas A&M University, College Station, Texas 77843, United States. The Department of Computer Science & Engineering, Texas A&M University, College Station, Texas 77843, United States" |
| DOI: | 10.1021/acs.analchem.2c01463 |
| ISSN/ISBN: | 1520-6882 (Electronic) 0003-2700 (Linking) |
| Abstract: | "Chip-scale infrared spectrometers consisting of a microring resonator array (MRA) were developed for volatile organic compound (VOC) detection. The MRA is serially positioned to serve as a wavelength sorting element that enables wavelength demultiplexing. Unlike conventional devices operated by a single microring, our MRA can perform multiwavelength mid-infrared (mid-IR) sensing by routing the resonant wavelength light from a broadband mid-IR source into different sensing channels. Miniaturized spectrometer devices were fabricated on mid-IR transparent silicon-rich silicon nitride (SiN(x)) thin films through complementary metal-oxide-semiconductor (CMOS) processes, thus enabling wafer-level manufacturing and packaging. The spectral distribution of the resonance lines and the optimization of the microring structures were designed using finite-difference time-domain (FDTD) modeling and then verified by laser spectrum scanning. Using small microring structures, the spectrum showed a large free spectral range (FSR) of 100 nm and held four spectral channels without crosstalk. Unlike near-infrared microrings using refractive index sensing, our MRA can detect hexane and ethanol vapor pulses by monitoring the intensity variation at their characteristic mid-IR absorption bands, thus providing high specificity. Applying multiwavelength detection, the sensor module can discriminate among various VOC vapors. Hence, our mid-IR MRA could be an essential component to achieve a compact spectroscopic sensing module that has the potential for applications such as remote environmental monitoring and portable health care devices" |
| Keywords: | Gases Light Refractometry/methods *Volatile Organic Compounds; |
| Notes: | "MedlineZhou, Junchao Husseini, Diana Al Li, Junyan Lin, Zhihai Sukhishvili, Svetlana Cote, Gerard L Gutierrez-Osuna, Ricardo Lin, Pao Tai eng Research Support, Non-U.S. Gov't 2022/08/02 Anal Chem. 2022 Aug 9; 94(31):11008-11015. doi: 10.1021/acs.analchem.2c01463. Epub 2022 Jul 31" |
