| Title: | Metal Oxide Thin Films Prepared by Magnetron Sputtering Technology for Volatile Organic Compound Detection in the Microwave Frequency Range |
| Author(s): | Rydosz A; Brudnik A; Staszek K; |
| Address: | "Department of Electronics, AGH University of Science and Technology, Al. Mickiewicza 30, 30-059 Krakow, Poland. rydosz@agh.edu.pl. Department of Electronics, AGH University of Science and Technology, Al. Mickiewicza 30, 30-059 Krakow, Poland. brudnik@agh.edu.pl. Department of Electronics, AGH University of Science and Technology, Al. Mickiewicza 30, 30-059 Krakow, Poland. kstaszek@agh.edu.pl" |
| ISSN/ISBN: | 1996-1944 (Print) 1996-1944 (Electronic) 1996-1944 (Linking) |
| Abstract: | "Metal oxide thin films such as copper oxide, titanium dioxide, and tin dioxide deposited by magnetron sputtering technology were verified as a gas-sensitive layer in microwave-based gas sensors operated at 2.4 GHz. The developed gas sensors were tested at room temperature (23 degrees C) and 50% relative humidity (RH) under exposure to 0(-)200 ppm of selected volatile organic compounds (acetone, ethanol, and methanol) that are of high interest in industry and biomedical applications. The highest responses to acetone were obtained for CuO-based gas sensors, to ethanol for SnO(2)-based gas sensors, while for methanol detection both dioxides, SnO(2) and TiO(2), exhibited good sensitivity" |
| Keywords: | gas sensors metal oxide thin films microwave frequency volatile organic compound detection; |
| Notes: | "PubMed-not-MEDLINERydosz, Artur Brudnik, Andrzej Staszek, Kamil eng 2017/26/D/ST7/00355/Narodowe Centrum Nauki/ 2016/23/D/ST7/00481/Narodowe Centrum Nauki/ Switzerland 2019/03/17 Materials (Basel). 2019 Mar 15; 12(6):877. doi: 10.3390/ma12060877" |
