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Rev Sci Instrum

Title:		"A rugged, high precision capacitance diaphragm low pressure gauge for cryogenic use"
Author(s):		Lago L; Herbeaux C; Bol M; Roy P; Manceron L;
Address:		"Synchrotron SOLEIL, L'Orme des Merisiers, F-91192 Gif-sur-Yvette, France"
Journal Title:		Rev Sci Instrum
Year:		2014
Volume:		85
Issue:		1
Page Number:		15108 -
DOI:		10.1063/1.4861358
ISSN/ISBN:		1089-7623 (Electronic) 0034-6748 (Linking)
Abstract:		"In order to carry out precise laboratory measurements of infrared absorption intensities, line profiles of molecules and organic volatile compounds for atmospheric chemistry in planetary and upper earth atmospheric layers, precise gas pressure measurement between 10(-3) and a few mbars in the 77-300 K temperature range is necessary. A prototype, rugged, precision capacitive pressure gauge for cryogenic use has been designed, built at SOLEIL and tested down to 77 K. The design includes corrosion-resistant materials and has been tailored to operate on a differential measurement scheme based on a simple, precision capacitance-to-digital converter chip, instead of high precision floating capacitive bridges, as are used in other designs. The designs conception and performance specifications are presented here, illustrated by a precision of better than 1% in the 0.2-40 mbar range, with a resolution of 2 x 10(-3) mbar. The gauge is tunable and can be adjusted for higher precision and a better resolution, at the expense of the maximum high-pressure range"
Keywords:
Notes:		"PubMed-not-MEDLINELago, Leatitia Herbeaux, Christian Bol, Marc Roy, Pascale Manceron, Laurent eng 2014/02/13 Rev Sci Instrum. 2014 Jan; 85(1):015108. doi: 10.1063/1.4861358"