| Title: | Complementary metal oxide semiconductor cantilever arrays on a single chip: mass-sensitive detection of volatile organic compounds |
| Author(s): | Lange D; Hagleitner C; Hierlemann A; Brand O; Baltes H; |
| Address: | "ETH Zurich, Physical Electronics Laboratory, Switzerland" |
| ISSN/ISBN: | 0003-2700 (Print) 0003-2700 (Linking) |
| Abstract: | "The sensing behavior of polymer-coated resonant cantilevers for mass-sensitive detection of volatile organic compounds was investigated. Industrial complementary metal oxide semiconductor (CMOS) technology combined with subsequent CMOS-compatible micromachining was used to fabricate a single-chip system comprising the transducers and all necessary driving and signal-conditioning circuitry. An analytical model was developed to describe the mass-sensing mechanism of polymer-coated resonant cantilevers. The model was validated by measurements of various gaseous analytes. As an exemplary application, the quantitative analysis of a binary mixture using an array of four cantilevers is described. Experimental results are given for the concentration prediction of a mixture of n-octane and toluene. Finally, it was established that the limit of detection achieved with cantilever sensors is comparable to that of other acoustic wave-based gas sensors" |
| Notes: | "PubMed-not-MEDLINELange, Dirk Hagleitner, Christoph Hierlemann, Andreas Brand, Oliver Baltes, Henry eng 2002/07/27 Anal Chem. 2002 Jul 1; 74(13):3084-95. doi: 10.1021/ac011269j" |
