« Previous Abstract"Chemometric characterization of alembic and industrial sugar cane spirits from cape verde and ceara, Brazil"    Next AbstractCMOS-MEMS VOC sensors functionalized via inkjet polymer deposition for high-sensitivity acetone detection »

Sensors (Basel)

Title:		Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing
Author(s):		Perello-Roig R; Verd J; Bota S; Segura J;
Address:		"Electronic Systems Group (GSE-UIB), Universitat de les Illes Balears, 07122 Palma (Balearic Islands), Spain. Biosensors, Medical Instrumentation and Data Analysis Group, Health Research Institute of the Balearic Islands (IdISBa), 07010 Palma, Spain"
Journal Title:		Sensors (Basel)
Year:		2020
Volume:		20200819
Issue:		17
Page Number:		-
DOI:		10.3390/s20174663
ISSN/ISBN:		1424-8220 (Electronic) 1424-8220 (Linking)
Abstract:		"Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing. It is demonstrated that the gas stream action itself modifies the device resonance frequency in a way that depends on the resonator clamp shape with a corresponding non-negligible impact on the gravimetric sensor resolution. Results indicate that such an effect must be accounted when designing MEMS resonators with potential applications in the detection of volatile organic compounds (VOCs). In addition, the impact of thermal perturbations was also investigated. Two types of four-anchored CMOS-MEMS plate resonators were designed and fabricated: one with straight anchors, while the other was sustained through folded flexure clamps. The mechanical structures were monolithically integrated together with an embedded readout amplifier to operate as a self-sustained fully integrated oscillator on a commercial CMOS technology, featuring low-cost batch production and easy integration. The folded flexure anchor resonator provided a flow impact reduction of 5x compared to the straight anchor resonator, while the temperature sensitivity was enhanced to -115 ppm/ degrees C, an outstanding result compared to the -2403 ppm/ degrees C measured for the straight anchored structure"
Keywords:		Cmos-mems MEMS resonators VOCs gas sensors temperature sensitivity;
Notes:		"PubMed-not-MEDLINEPerello-Roig, Rafel Verd, Jaume Bota, Sebastia Segura, Jaume eng TEC2017-88635-R/Ministerio de Economia y Competitividad/ Switzerland 2020/08/23 Sensors (Basel). 2020 Aug 19; 20(17):4663. doi: 10.3390/s20174663"