| Title: | A ppm Ethanol Sensor Based on Fabry-Perot Interferometric Surface Stress Transducer at Room Temperature |
| Author(s): | Takahashi T; Choi YJ; Sawada K; Takahashi K; |
| Address: | "Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan. Japan Society for the Promotion of Science, Tokyo 102-0083, Japan. Electronics Inspired-Interdisciplinary Research Institute (EIIRIS), Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan" |
| ISSN/ISBN: | 1424-8220 (Electronic) 1424-8220 (Linking) |
| Abstract: | "Disease screening by exhaled breath diagnosis is less burdensome for patients, and various devices have been developed as promising diagnostic methods. We developed a microelectromechanical system (MEMS) optical interferometric surface stress sensor to detect volatile ethanol gas at room temperature (26~27 degrees C) with high sensitivity. A sub-micron air gap in the optical interferometric sensor reduces interference orders, leading to increased spectral response associated with nanomechanical deflection caused by ethanol adsorption. The sub-micron cavity was embedded in a substrate using a transfer technique of parylene-C nanosheet. The sensor with a 0.4 microm gap shows a linear stable reaction, with small standard deviations, even at low ethanol gas concentrations of 5-110 ppm and a reversible reaction to the gas concentration change. Furthermore, the possibility of detecting sub-ppm ethanol concentration by optimizing the diameter and thickness of the deformable membrane is suggested. Compared with conventional MEMS surface stress gas sensors, the proposed optical interferometric sensor demonstrated high-sensitivity gas detection with exceeding the detection limit by two orders of magnitude while reducing the sensing area" |
| Keywords: | chemical sensing ethanol fabry-perot interference film transfer technique microelectromechanical systems optical interferometry surface stress sensor volatile organic compounds; |
| Notes: | "PubMed-not-MEDLINETakahashi, Toshiaki Choi, Yong-Joon Sawada, Kazuaki Takahashi, Kazuhiro eng JP19J12825/Japan Society for the Promotion of Science/ 15655927/Precursory Research for Embryonic Science and Technology/ Letter Switzerland 2020/12/04 Sensors (Basel). 2020 Nov 30; 20(23):6868. doi: 10.3390/s20236868" |
