Title: | Novel Gas Sensor Arrays Based on High-Q SAM-Modified Piezotransduced Single-Crystal Silicon Bulk Acoustic Resonators |
Author(s): | Zhao Y; Yang Q; Chang Y; Pang W; Zhang H; Duan X; |
Address: | "State Key Laboratory of Precision Measuring Technology & Instruments, Tianjin University, Tianjin 300072, China. zhaoyuan@tju.edu.cn. State Key Laboratory of Precision Measuring Technology & Instruments, Tianjin University, Tianjin 300072, China. yangqingrui@tju.edu.cn. State Key Laboratory of Precision Measuring Technology & Instruments, Tianjin University, Tianjin 300072, China. cy0803@tju.edu.cn. State Key Laboratory of Precision Measuring Technology & Instruments, Tianjin University, Tianjin 300072, China. weipang@tju.edu.cn. State Key Laboratory of Precision Measuring Technology & Instruments, Tianjin University, Tianjin 300072, China. haozhang@tju.edu.cn. State Key Laboratory of Precision Measuring Technology & Instruments, Tianjin University, Tianjin 300072, China. xduan@tju.edu.cn" |
ISSN/ISBN: | 1424-8220 (Electronic) 1424-8220 (Linking) |
Abstract: | "This paper demonstrates a novel micro-size (120 mum x 200 mum) piezoelectric gas sensor based on a piezotransduced single-crystal silicon bulk acoustic resonator (PSBAR). The PSBARs operate at 102 MHz and possess high Q values (about 2000), ensuring the stability of the measurement. A corresponding gas sensor array is fabricated by integrating three different self-assembled monolayers (SAMs) modified PSBARs. The limit of detection (LOD) for ethanol vapor is demonstrated to be as low as 25 ppm with a sensitivity of about 1.5 Hz/ppm. Two sets of identification code bars based on the sensitivities and the adsorption energy constants are utilized to successfully discriminate isopropanol (IPA), ethanol, hexane and heptane vapors at low and high gas partial pressures, respectively. The proposed sensor array shows the potential to form a portable electronic nose system for volatile organic compound (VOC) differentiation" |
Keywords: | Mems e-nose system gas sensing piezotransduced single-crystal silicon bulk acoustic resonators; |
Notes: | "PubMed-not-MEDLINEZhao, Yuan Yang, Qingrui Chang, Ye Pang, Wei Zhang, Hao Duan, Xuexin eng Switzerland 2017/07/05 Sensors (Basel). 2017 Jun 26; 17(7):1507. doi: 10.3390/s17071507" |