Title: | Cyclic olefin copolymer plasma millireactors |
Author(s): | Schelcher G; Guyon C; Ognier S; Cavadias S; Martinez E; Taniga V; Malaquin L; Tabeling P; Tatoulian M; |
Address: | "Institut de Recherche de Chimie Paris, CNRS - Chimie ParisTech, 11 rue Pierre et Marie Curie, 75005 Paris, France. michael.tatoulian@chimie-paristech.fr" |
ISSN/ISBN: | 1473-0189 (Electronic) 1473-0189 (Linking) |
Abstract: | "The novelty of this paper lies in the development of a multistep process for the manufacturing of plasma millireactors operating at atmospheric pressure. The fabrication process relies on the integration of metallic electrodes over a cyclic olefin copolymer chip by a combination of photopatterning and sputtering. The developed plasma millireactors were successfully tested by creating air discharges in the gas volume of the millichannel. A sputtered silica layer was deposited on the channel walls to provide a barrier between the plasma and the polymer in order to prevent the alteration of polymer surfaces during the plasma treatment. Interest in this process of employing plasma millireactor as a high reactive environment is demonstrated here by the degradation of a volatile organic compound (acetaldehyde) in ambient air. In this miniaturized device, we obtained a high acetaldehyde conversion (98%) for a specific input energy lower than 200 J L(-1)" |
Notes: | "PubMed-not-MEDLINESchelcher, G Guyon, C Ognier, S Cavadias, S Martinez, E Taniga, V Malaquin, L Tabeling, P Tatoulian, M eng England 2014/06/25 Lab Chip. 2014 Aug 21; 14(16):3037-42. doi: 10.1039/c4lc00423j. Epub 2014 Jun 24" |