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Sensors (Basel)

Title:		FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible AlN/SiO(2)/Si Multilayer Structure
Author(s):		Aslam MZ; Jeoti V; Karuppanan S; Malik AF; Iqbal A;
Address:		"Department of Electrical and Electronics Engineering, Universiti Teknologi PETRONAS, 32610 Seri Iskandar, Perak, Malaysia. mzubair.ciit@yahoo.com. Department of Electrical and Electronics Engineering, Universiti Teknologi PETRONAS, 32610 Seri Iskandar, Perak, Malaysia. varun_jeoti@utp.edu.my. Department of Mechanical Engineering, Universiti Teknologi PETRONAS, 32610 Seri Iskandar, Perak, Malaysia. saravanan_karuppanan@utp.edu.my. Department of Electrical and Electronics Engineering, Universiti Teknologi PETRONAS, 32610 Seri Iskandar, Perak, Malaysia. aamir.malik@utp.edu.my. Department of Electrical and Electronics Engineering, Universiti Teknologi PETRONAS, 32610 Seri Iskandar, Perak, Malaysia. asif.iqbal@utp.edu.my"
Journal Title:		Sensors (Basel)
Year:		2018
Volume:		20180524
Issue:		6
Page Number:		-
DOI:		10.3390/s18061687
ISSN/ISBN:		1424-8220 (Electronic) 1424-8220 (Linking)
Abstract:		"A Finite Element Method (FEM) simulation study is conducted, aiming to scrutinize the sensitivity of Sezawa wave mode in a multilayer AlN/SiO(2)/Si Surface Acoustic Wave (SAW) sensor to low concentrations of Volatile Organic Compounds (VOCs), that is, trichloromethane, trichloroethylene, carbon tetrachloride and tetrachloroethene. A Complimentary Metal-Oxide Semiconductor (CMOS) compatible AlN/SiO(2)/Si based multilayer SAW resonator structure is taken into account for this purpose. In this study, first, the influence of AlN and SiO(2) layers’ thicknesses over phase velocities and electromechanical coupling coefficients (k(2)) of two SAW modes (i.e., Rayleigh and Sezawa) is analyzed and the optimal thicknesses of AlN and SiO(2) layers are opted for best propagation characteristics. Next, the study is further extended to analyze the mass loading effect on resonance frequencies of SAW modes by coating a thin Polyisobutylene (PIB) polymer film over the AlN surface. Finally, the sensitivity of the two SAW modes is examined for VOCs. This study concluded that the sensitivity of Sezawa wave mode for 1 ppm of selected volatile organic gases is twice that of the Rayleigh wave mode"
Keywords:		AlN FEM simulation Sezawa mode Voc;
Notes:		"PubMed-not-MEDLINEAslam, Muhammad Zubair Jeoti, Varun Karuppanan, Saravanan Malik, Aamir Farooq Iqbal, Asif eng Switzerland 2018/06/09 Sensors (Basel). 2018 May 24; 18(6):1687. doi: 10.3390/s18061687"