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J Air Waste Manag Assoc

Title:		Adsorption and desorption characteristics of semiconductor volatile organic compounds on the thermal swing honeycomb zeolite concentrator
Author(s):		Chang FT; Lin YC; Bai H; Pei BS;
Address:		"Department of Engineering and System Science, National Tsing Hua University, Hsin-chu, Taiwan"
Journal Title:		J Air Waste Manag Assoc
Year:		2003
Volume:		53
Issue:		11
Page Number:		1384 - 1390
DOI:		10.1080/10473289.2003.10466301
ISSN/ISBN:		1096-2247 (Print) 1096-2247 (Linking)
Abstract:		"The use of a honeycomb zeolite concentrator and an oxidation process is one of the most popular methods demonstrated to control volatile organic compound (VOCs) emissions from waste gases in semiconductor manufacturing plants. This study attempts to characterize the performance of a concentrator in terms of the removal efficiencies of semiconductor VOCs (isopropyl alcohol [IPA], acetone, propylene glycol methyl ether [PGME], and propylene glycol monomethyl ether acetate [PGMEA]) under several parameters that govern the actual operations. Experimental results indicated that at inlet temperatures of under 40 degrees C and a relative humidity of under 80%, the removal efficiency of a zeolite concentrator can be maintained well over 90%. The optimal rotation speed of the concentrator is between 3 and 4.5 rph in this study. The optimal rotation speed increases with the VOCs inlet concentration. Furthermore, reducing the concentration ratio helps to increase the removal efficiency, but it also increases the incineration cost. With reference to competitive adsorption, PGMEA and PGME are more easily adsorbed on a zeolite concentrator than are IPA and acetone because of their high boiling points and molecular weights"
Keywords:		Adsorption Environmental Pollution/*prevention & control Incineration Organic Chemicals Oxidation-Reduction Refuse Disposal/*methods *Semiconductors Zeolites/*chemistry;
Notes:		"MedlineChang, Feng-Tang Lin, Yu-Chih Bai, Hsunling Pei, Bau-Shei eng Research Support, Non-U.S. Gov't 2003/12/03 J Air Waste Manag Assoc. 2003 Nov; 53(11):1384-90. doi: 10.1080/10473289.2003.10466301"