| Title: | Deposition of MoSe(2) flakes using cyclic selenides |
| Author(s): | Charvot J; Zazpe R; Krumpolec R; Rodriguez-Pereira J; Pavlinak D; Pokorny D; Klikar M; Jelinkova V; Macak JM; Bures F; |
| Address: | "Institute of Organic Chemistry and Technology, Faculty of Chemical Technology, University of Pardubice Studentska 573 Pardubice 53210 Czech Republic filip.bures@upce.cz. Center of Materials and Nanotechnologies, Faculty of Chemical Technology, University of Pardubice Nam. Cs. Legii 565 Pardubice 53002 Czech Republic. Central European Institute of Technology, Brno University of Technology Purkynova 123 Brno 61200 Czech Republic. Department of Physical Electronics, CEPLANT-R&D Center for Plasma and Nanotechnology Surface Modifications, Faculty of Science, Masaryk University Kotlarska 267/2 61137 Brno Czech Republic. The Institute of Technology and Business in Ceske Budejovice Okruzni 517/10 370 01 Ceske Budejovice Czech Republic" |
| ISSN/ISBN: | 2046-2069 (Electronic) 2046-2069 (Linking) |
| Abstract: | "The currently limited portfolio of volatile organoselenium compounds used for atomic layer deposition (ALD) has been extended by designing and preparing a series of four-, five- and six-membered cyclic silylselenides. Their fundamental properties were tailored by alternating the ring size, the number of embedded Se atoms and the used peripheral alkyl chains. In contrast to former preparations based on formation of sodium or lithium selenides, the newly developed synthetic method utilizes a direct and easy reaction of elemental selenium with chlorosilanes. Novel 2,2,4,4-tetraisopropyl-1,3,2,4-diselenadisiletane, which features good trade-off between chemical/thermal stability and reactivity, has been successfully used for gas-to-solid phase reaction with MoCl(5) affording MoSe(2). A thorough characterization of the as-deposited 2D MoSe(2) flakes revealed its out-of-plane orientation and high purity. Hence, the developed four-membered cyclic silylselenide turned out to be well-suited Se-precursor for ALD of MoSe(2)" |
| Notes: | "PubMed-not-MEDLINECharvot, Jaroslav Zazpe, Raul Krumpolec, Richard Rodriguez-Pereira, Jhonatan Pavlinak, David Pokorny, Daniel Klikar, Milan Jelinkova, Veronika Macak, Jan M Bures, Filip eng England 2022/04/29 RSC Adv. 2021 Jun 23; 11(36):22140-22147. doi: 10.1039/d0ra10239c. eCollection 2021 Jun 21" |
