| Title: | Improved Sensing Capability of Integrated Semiconducting Metal Oxide Gas Sensor Devices |
| Author(s): | Lahlalia A; Le Neel O; Shankar R; Selberherr S; Filipovic L; |
| Address: | "Institute for Microelectronics, TU Wien, 1040 Vienna, Austria. lahlalia@iue.tuwien.ac.at. STMicroelectronics Pte Ltd., Singapore 569508, Singapore. olivier.leneel@st.com. STMicroelectronics Pte Ltd., Singapore 569508, Singapore. ravi.shankar@st.com. Institute for Microelectronics, TU Wien, 1040 Vienna, Austria. selberherr@iue.tuwien.ac.at. Institute for Microelectronics, TU Wien, 1040 Vienna, Austria. filipovic@iue.tuwien.ac.at" |
| ISSN/ISBN: | 1424-8220 (Electronic) 1424-8220 (Linking) |
| Abstract: | "Semiconducting metal oxide (SMO) gas sensors were designed, fabricated, and characterized in terms of their sensing capability and the thermo-mechanical behavior of the micro-hotplate. The sensors demonstrate high sensitivity at low concentrations of volatile organic compounds (VOCs) at a low power consumption of 10.5 mW. In addition, the sensors realize fast response and recovery times of 20 s and 2.3 min, respectively. To further improve the baseline stability and sensing response characteristics at low power consumption, a novel sensor is conceived of and proposed. Tantalum aluminum (TaAl) is used as a microheater, whereas Pt-doped SnO(2) is used as a thin film sensing layer. Both layers were deposited on top of a porous silicon nitride membrane. In this paper, two designs are characterized by simulations and experimental measurements, and the results are comparatively reported. Simultaneously, the impact of a heat pulsing mode and rubber smartphone cases on the sensing performance of the gas sensor are highlighted" |
| Keywords: | electro-thermal-mechanical simulation gas sensor microheater semiconducting metal oxide smartphone ultra-low power; |
| Notes: | "PubMed-not-MEDLINELahlalia, Ayoub Le Neel, Olivier Shankar, Ravi Selberherr, Siegfried Filipovic, Lado eng Switzerland 2019/01/20 Sensors (Basel). 2019 Jan 17; 19(2):374. doi: 10.3390/s19020374" |
