| Title: | Syntheses of eta(1) -Alkyl-eta(3) -Allyl-eta(5) -Cyclopentadienyl Cobalt(III) Complexes and Their Use in Low-temperature Atomic Layer Deposition of Cobalt-Containing Thin Films |
| Author(s): | Lu K; Zhu J; Wang J; Wa Q; Guo Z; Xiong W; Gao Y; Lei R; Cheng B; Wang X; |
| Address: | "School of Advanced Materials, Shenzhen Graduate School, Peking University, Shenzhen, 518055, P. R. China. State Key Laboratory of Nuclear Physics and Technology, School of Physics, Peking University, Beijing, 100871, P. R. China. School of Science, Harbin Institute of Technology, Shenzhen, Shenzhen, 518055, P. R. China" |
| ISSN/ISBN: | 1521-3765 (Electronic) 0947-6539 (Linking) |
| Abstract: | "Herein, we report the design and scalable synthesis of three new Co(III) complexes, which have an unusual hydrocarbon eta(1) -alkyl-eta(3) -allyl-eta(5) -cyclopentadienyl ligation structure, from the reactions of readily available cobalt(II) compound CoCl(2) (PPh(3) )(2) and biomass material beta-pinene via C-C bond activation. These Co(III) complexes are air-stable, fairly volatile, and thermally stable, so they are excellent candidates as the metal precursors for the vapor deposition of cobalt-containing thin films. As a demonstration, we show that the Co(III) complex of [(3'-5'-eta,1-sigma)-methylene(2,2,4-trimethyl-4-cyclohexene-1,3-diyl)](eta(5) -methylcyclopentadienyl)Co (i. e. (seco-pinene)(MeCp)Co) is well suited for the atomic layer deposition (ALD) of Co(3) O(4) and CoS(2) thin films, and the deposited Co(3) O(4) and CoS(2) films are able to conformally cover trench structures with a fairly high aspect ratio of 10 : 1" |
| Keywords: | C-C bond activation atomic layer deposition cobalt metal-organic complexes pinene; |
| Notes: | "PubMed-not-MEDLINELu, Ke Zhu, Jiahao Wang, Jialiang Wa, Qingbo Guo, Zheng Xiong, Wei Gao, Yuan Lei, Renbo Cheng, Bichu Wang, Xinwei eng 51961165105/National Natural Science Foundation of China/ 22175005/National Natural Science Foundation of China/ 2020B1515120039/Guangdong Basic and Applied Basic Research Foundation/ JCYJ20200109110628172/Shenzhen Fundamental Research Program/ GXWD20201231165807007-20200802205241003/Shenzhen Fundamental Research Program/ GXWD20201230155427003-20200822151253001/Shenzhen Fundamental Research Program/ HA11409033/Shenzhen Peacock Plan/ HA45001081/HITSZ/ NPT2021KFJ43/State Key Laboratory of Nuclear Physics and Technology, Peking University/ Germany 2022/11/30 Chemistry. 2023 Mar 16; 29(16):e202203656. doi: 10.1002/chem.202203656. Epub 2023 Feb 14" |
