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Sensors (Basel)

Title:		Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection
Author(s):		Possas-Abreu M; Ghassemi F; Rousseau L; Scorsone E; Descours E; Lissorgues G;
Address:		"ESYCOM, ESIEE-Paris, Cite Descartes BP99, 93162 Noisy-le-Grand, France. maira.possasabreu@esiee.fr. ESYCOM, ESIEE-Paris, Cite Descartes BP99, 93162 Noisy-le-Grand, France. farbod.ghassemi@esiee.fr. ESYCOM, ESIEE-Paris, Cite Descartes BP99, 93162 Noisy-le-Grand, France. lionel.rousseau@esiee.fr. CEA, LIST, Diamond Sensor Laboratory, 91191 Gif-sur-Yvette, France. emmanuel.scorsone@cea.fr. ISIPCA, 34-36 Rue du Parc de Clagny, 78000 Versailles, France. edescours@isipca.fr. ESYCOM, ESIEE-Paris, Cite Descartes BP99, 93162 Noisy-le-Grand, France. gaelle.lissorgues@esiee.fr"
Journal Title:		Sensors (Basel)
Year:		2017
Volume:		20170524
Issue:		6
Page Number:		-
DOI:		10.3390/s17061163
ISSN/ISBN:		1424-8220 (Electronic) 1424-8220 (Linking)
Abstract:		"This paper reports on the development of an autonomous instrument based on an array of eight resonant microcantilevers for vapor detection. The fabricated sensors are label-free devices, allowing chemical and biological functionalization. In this work, sensors based on an array of silicon and synthetic diamond microcantilevers are sensitized with polymeric films for the detection of analytes. The main advantage of the proposed system is that sensors can be easily changed for another application or for cleaning since the developed gas cell presents removable electrical connections. We report the successful application of our electronic nose approach to detect 12 volatile organic compounds. Moreover, the response pattern of the cantilever arrays is interpreted via principal component analysis (PCA) techniques in order to identify samples"
Keywords:		VOC discrimination electronic nose gas sensors microcantilevers sensor arrays synthetic diamond;
Notes:		"PubMed-not-MEDLINEPossas-Abreu, Maira Ghassemi, Farbod Rousseau, Lionel Scorsone, Emmanuel Descours, Emilie Lissorgues, Gaelle eng Switzerland 2017/05/26 Sensors (Basel). 2017 May 24; 17(6):1163. doi: 10.3390/s17061163"