| Title: | Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid |
| Address: | "State Key Lab of Transducer Technology, Shanghai Institute of Microsystem & Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China" |
| ISSN/ISBN: | 2072-666X (Print) 2072-666X (Electronic) 2072-666X (Linking) |
| Abstract: | "Resonant micro/nanoelectromechanical systems (MEMS/NEMS) with on-chip integrated excitation and readout components, exhibit exquisite gravimetric sensitivities which have greatly advanced the bio/chemical sensor technologies in the past two decades. This paper reviews the development of integrated MEMS/NEMS resonators for bio/chemical sensing applications mainly in air and liquid. Different vibrational modes (bending, torsional, in-plane, and extensional modes) have been exploited to enhance the quality (Q) factors and mass sensing performance in viscous media. Such resonant mass sensors have shown great potential in detecting many kinds of trace analytes in gas and liquid phases, such as chemical vapors, volatile organic compounds, pollutant gases, bacteria, biomarkers, and DNA. The integrated MEMS/NEMS mass sensors will continuously push the detection limit of trace bio/chemical molecules and bring a better understanding of gas/nanomaterial interaction and molecular binding mechanisms" |
| Keywords: | bio/chemical sensing gravimetric sensors integrated resonators quality factor resonant modes; |
| Notes: | "PubMed-not-MEDLINEJia, Hao Xu, Pengcheng Li, Xinxin eng 2020YFB2008603/National Key R&D Program of China/ Review Switzerland 2021/06/03 Micromachines (Basel). 2021 May 31; 12(6):645. doi: 10.3390/mi12060645" |
